200 kV, Schottky Field Emission Gun

Ultra High Resolution Pole Piece (Cs=0.5 mm)

0.19 nm Point-to-Point Resolution

Minimum Beam Size: 0.5 nm

Specimen Tilt Angle (X axis): ±20º

High Resolution Imaging

Convergent Beam Electron Diffraction (CBED)

Energy Dispersive X-Ray Analysis (EDS)

Electron Energy Loss Spectroscopy (EELS)

Nanofactory TEM-STM system